ACCRETECH UF200R

UF200R

Fully automatic Wafer Prober for 120 to 200 mm wafers.

  • High Throughput
  • Wide Scope of Application
  • High Planning Safety
  • Numerous Options for Upgrading
  • Now with the latest SW and Electronics generation
  • Also available for numerous special applications, such as MEMS wafer handling
  • Highest speed 300 mm/s in the XY-axis, 30 mm/s in the Z-axis, spindle rotation angle +-5 deg
  • With second card feeder as an option
  • Wafer Handling with robot arm and backside holding