ACCRETECH UF2000

UF2000

Fully automatic Wafer Prober for a high throughput – for 120 to 200 mm wafers

• Micrometer precision positioning control
• Exact determination of the temperature
• Highly efficient Multi-Pin Probing

• Precision +-1.5 µm, with the newest optics to determine the positioning precision
• Ultra-stable Z/θ platform for Multi-Pin Probing Contact
• Precise control of the surrounding temperature – optionally with Low Temperature Chuck or Hot Chuck
• High flexibility – numerous options such as the double loader
• Simple operation – multifunctional display and touch screen operation
• Each drive axis can be separately controlled – for optimum control of each individual component